冰研應用股份有限公司Advanced HiVac Application Co., LTD

High performance helium leak detector with 2 turbo pump

AHA LD500 TⅡ LEAK DETECTOR

冰研氦氣測漏儀.PDF

AHA LD500 TⅡ LEAK DETECTOR

Main Specifications (red font means the world's highest level or only)

1.Minimum Sensitivity: 5x10E(-11) Torr Liter/Sec

2.Maximum Test Port Pressure: 5 Tor ( optional 20 Torr, 100 Torr , 200Torr )

3.Test Port Net Helium Pumping Speed >28 liter/Sec (Dual Turbo pump,Gas driven gate valve)

4.Test Port Ultimate Pressure: 5x10E-6 Torr

5.Operation Languages: Traditional Chinese Simplified Chinese English (Other languages are optional)

6.Test Port Flange: KF50, KF40,KF25

7.Primary pump pumping

Internal Composition Structure:

1. The world's leading brand of standard vacuum components, durable and cheap (compared with special parts)

2. Agilent Spectrometer Tube & PCB, Standard (the world's first brand analyzer)

3. Agilent V-81M high vacuum turbomolecular pump (one for the mass spectrometer vacuum another as a dedicated pumping)

4. Agilent Dry Scroll Pump or Agilent DS402 Rotary Vane Pump

5. Granville Phillips 275 Module, using the world's most reliable low vacuum gauge, standard (non-special products), can measure 760Torr ~ 1.0E (-4) Torr, (also available Granville 356 or Agilent 702 full range of vacuum gauge, 760 ~ 1.0E (-9) Torr), stable and reliable large volume large area resistant to pollution is not easy to distort.

6. PLC controller plus industrial touch screen microprocessor (Simplified/Traditional Chinese English display)

7. VAT Gate Valve & Agilent or VAT pneumatic right angle valve

8. The test software developed by our company can record the leak rate time tester staff part number to track the test process (PC BASE), Auto Test Function can reduce the staff test time and error operation

Advantages of this product

1 Test quickly

1.1 The use of pneumatic angle valve or gate valve is not more than 20 times more than the traditional leak detector (35 liter / sec, KF-40, 250Liter / sec KF-50 Gate VALVE) with the solenoid valve, and the amount of helium captured is 10 times Traditional standard leak detector (such as Inficon 1000, MODUL300, VSMD30)

1.2 With dedicated molecular turbo pump pumping speed and exclusion of helium background signal quickly

1.3 50 Liter chamber 1.5 minutes 1atm reaches 1.0E-9 atmcc / sec following background values

1.4 1.5 minutes from an atmospheric pressure can be measured 1.0E-9 atmcc / sec (7 meters KF-25 bellow)

1.5 1.5 minutes from an atmospheric pressure to can be measured 1.0E-9 atmcc / sec (7 m 1 tube)

1.6 exclusion of helium quickly

1.7 Test port pressure <1.0E-6 Torr with Fast Mode

1.8 28 liter / sec for Helium pumping speed

2 Vacuum system is simple to construct and with the best vacuum gauge and the best valve to maintain a high rate of volume design is slightly larger but easy to repair and maintenance cheap

3 Reliable and durable

4 The company developed a number of peripheral parts software for users to use (with LED industry MOCVD dedicated machine for high corrosion resistance high activity gas high viscosity gas dust use, pipe industry, valve industry, electrical industry professional machine semiconductor implant machine semiconductor PVD special machine)

5 Another power plant leak detection machine (high water vapor environment)

6 Leak detection unit Torr liter / sec, mbar liter / sec, atm cc / sec, Pa M3 / hour, PPM, OZ / Year .....