Pumping speed

ISO 100 / CF 6”

ISO 160 / CF 8”

N₂

250 l/s

250 l/s

He

255 l/s

255 l/s

H₂

220 l/s

220 l/s

Ar

250 l/s

250 l/s

Gas throughput at full rotational speed (with recommended forepump)

Ambient Temp.
(25°C)

Water Temp.
(25°C, 50 l/h)

N₂

170 sccm

170 sccm

Ar

110 sccm

110 sccm

Compression ratio & Foreline Tolerance

N₂

> 1 x 10¹