冰研應用股份有限公司Advanced HiVac Application Co., LTD
  

VHS-4 Diffusion Pump



VHS-4.pdf

Technical Specifications

Pumping Speed, Operating Range Pumping Speed, AVS 4.1 (1963) 750 l/s air, 940 l/s He/H2 1,200 l/s Air
Maximum Throughput 1.5 T-l/s (2.0 mbar-l/s) in operating range, 2.5 T-l/s (3.2 mbar-l/s) @ 0.01 torr
Operating Range 2 x 10-3 to <5 x 10-9 torr (2.7 x 10-3 to <6.5 x 10-9 mbar)
Maximum Forepressure No Load: 0.65 torr (0.86 mbar) Full Load: 0.55 torr (0.73 mbar)
Recommended Backing Pump ≥10 cfm (17 m3/hr)
Backstreaming Rate, Standard Cold Cap <5 x 10-4 mg/cm2/min
Warmup Time 10 minutes
Cooldown Time 10 minutes (with quick cool coil)
Fluid Charge 300 cc
Electrical Requirements 1 ph, 50/60 Hz, 120/208/240 VAC
Pump Power 1450 watts
Cooling Water Requirements 0.15 gpm (30 l/hr) at 60-80°F (15-26°C)
Water Connections 1⁄8 in. FPT Tee


 

 

 

 

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