V2300 Turbo Pump
Technical Specifications
Vacuum Performances | |
Pumping speed for N2 (*) | 2050 l/s |
Pumping speed for He (*) | 1800 L/s |
Pumping speed for H2 (*) | 1500 L/s |
Compression ratio for N2 | >8 x 108 |
Compression ratio for He | 8 x 105 |
Compression ratio for H2 | 4 x 104 |
Base pressure* (with recommended forepump) | 10-10 mbar (7.5 x 10-11 Torr) (**) |
Inlet Flange | ISO 250F, CFF 12” O.D. |
Foreline flange | KF 40 NW |
Other | |
Nominal rotational speed | 33300 rpm |
Start-up time without gas load and with the recommended forepump | < 6 minutes |
Minimum recommended forepump | TriScroll 600 |
Operational position | Any |
Operating ambient temperature | +5 °C to +35 °C |
Bakeout temperature | 120°C (CFF), 80°C (ISO) |
Max rotor temperature | 120 °C |
Vibration level (displacement) | < 0.01 μm at inlet flange |
Lubricant |