冰研應用股份有限公司Advanced HiVac Application Co., LTD
  

HS-20 Diffusion Pump



HS-20Manual.pdf

Technical Specifications

 

Pumping Speed, Operating Range 
Pumping Speed, AVS 4.1 (1963)
10,000 l/s air, 12,500 l/s He and H2
17,500 l/s Air
Maximum Throughput 12.5 T-l/s (16.7 mbar l/s) in operating range, 18 T-l/s (23 mbar-l/s) @ 0.01 torr
Operating Range 1.3 x 10-3 to 5 x 10-8 torr (1.7 x 10-3 to 6.5 x 10-8 mbar)
Maximum Forepressure No Load: 0.65 torr (0.85 mbar) 
Full Load: 0.55 torr (0.72 mbar)
Recommended Backing Pump ɛ100 cfm (170 m3/hr)
Backstreaming Rate, Standard Cold Cap <1.5 x 10-3 mg/cm2/min
Warmup Time 45 minutes
Cooldown Time 85 minutes
Fluid Charge 5 quarts (4.7 liters)
Electrical Requirements 3 ph, 50/60 Hz, 240/415/480 VAC
Pump Power 12,000 watts
Cooling Water Requirements 1.5 gpm (300 l/hr) at 60-80°F (15-26°C)
Water Connections 1⁄4 in. FPT Tee
Recommended Fluid DC-704


 

 

 

 

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