V84FS Turbo Pump
| Pumping Speed | KF 40 | CFF 2.75" | ISO 63 / CFF 4.5” | |
| Ar | 44 l/s | 57 l/s | 66 l/s | |
| N2 | 49 l/s | 56 l/s | 67 l/s | |
| He | 38 l/s | 46 l/s | 63 l/s | |
| H2 | 36 l/s | 40 l/s | 53 l/s | |
| Gas throughput at full rotational speed (with recommended forepump) | Air cooling (25°C) | Water cooling (25°C, 65 l/h) | ||
| N2 | 100 sccm | 100 sccm | ||
| Ar | 70 sccm | 70 sccm | ||
| Compression ratio & Foreline tolerance | Compression ratio | Foreline tolerance | ||
| Ar | > 1.0 x 1011 | > 14 mbar | ||
| N2 | ≥ 1.0 x 1011 | > 14 mbar | ||
| He | 2.0 x 106 | > 12 mbar | ||
| H2 | 5.0 x 104 | > 4 mbar | ||
| Base pressure with recommended forepump (5
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