V551 Turbo Pump
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Pumping Speed |
N2 350l/s 550l/s |
He 450l/s 600l/s |
H2 450l/s 510l/s |
| Compression Ratio |
1 x 109 |
1 x 107 |
1 x 106 |
| Base pressure (with recommended forepump) | <1 x 10-10 mbar (<1 x 10-10 Torr) | ||
| Inlet Flange Options | CFF 6”; CFF 8”; ISO 160; ISO 160-F bolted | ||
| Foreline Flange | KF25 | ||
| Rotational Speed | 42,000 rpm | ||
| Start-up Time | <5 minutes | ||
| Recommended Forepumps | Agilent TS300 Dry Scroll Pump; Agilent DS-302 Rotary Vane Pump |
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| Operating Position | Any | ||
| Cooling Requirements | Natural air convection; Water optional (use water with electrical conductivity = 500 µS/cm) |
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| Bakeout Temperature | 120oC at inlet flange, maximum (CF Flange); 80oC at inlet flange, maximum (ISO Flange) |
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| Vibration Level (displacement) | <0.01 µm at inlet flange | ||
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