Pumping speed (l/s)

With CF 4 1/2” or ISO 63:

N₂: 77 l/s

He: 65 l/s

H₂: 50 l/s

With CF 2 3/4” or KF 40:

N₂: 50 l/s

He: 56 l/s

H₂: 46 l/s

Compression ratio

N₂: >7 x 10⁶

He: 3 x 10³

H₂: 3 x 10²

Base pressure* (with recommended forepump)

5 x 10^-9 mbar (3.8 x 10^-9 Torr)

Inlet flange

CF 4 1/2” O.D.

CF 2 3/4” O.D.

ISO 63

KF 40

Foreline flange

KF 16 NW

Rotational speed

1350 Hz (max)

Start-up time

< 60 seconds

Recommended forepump

Mechanical: Agilent DS 42<