304FS Turbo Pump
Technical Specifications
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Pumping speed |
ISO 100 / CF 6” |
ISO 160 / CF 8” |
|
N2 |
250 l/s |
250 l/s |
|
He |
255 l/s |
255 l/s |
|
H2 |
220 l/s |
220 l/s |
|
Ar |
250 l/s |
250 l/s |
|
Gas throughput at full rotational speed (with recommended forepump) |
Ambient Temp. |
Water Temp. |
|
N2 |
170 sccm |
170 sccm |
|
Ar |
110 sccm |
110 sccm |
|
Compression ratio & Foreline Tolerance |
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|
N2 |
> 1 x 1011 |
>10 mbar |
|
He |
> 1 x 108 |
>10 mbar |
|
H2 |
1.5 x 106 |
>4 mbar |
|
Ar |
> 1 x 1011 |
>10 mbar |
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Base pressure with recommended forepump (5 m3/h) |
< 1 x 10-10 mbar (< 1 x 10-10 Torr) |
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Inlet flange |
CFF 8” O.D. ISO 160 |
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|
CFF 6” O.D. ISO 100 |
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Foreline flange |
KF16 NW (KF25 - optional) |
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|
Rotational speed |
60000 rpm (1010 Hz driving frequency) |
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|
Start-up time |
< 3 minutes |
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Recommended forepump |
mechanical: |
Agilent DS 102 |
|
dry pump: |
Agilent SH 110 |
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|
Operating position |
Any |
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|
Operating ambient temperature |
+5 °C to +35 °C |
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|
Relative humidity of air |
0 - 90 % (not condensing) |
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Bakeout temperature |
80 °C at inlet flange max (ISO flange) |
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|
120 °C at inlet flange max (CFF flange) |
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Lubricant |
Permanent lubrication |
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|
Cooling requirements |
Forced air (5- 35 °C ambient temperature) |
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|
Water (mandatory if ambient temperature > 35 °C) |
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Coolant water |
Minimum flow: 50 l/h (0.89 GPM) |
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Temperature: +15 °C to +30 °C |
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Pressure: 3 to 5 bar (45 to 75 psi) |
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Noise Pressure level |
< 50 dB(A) at 1 meter |
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Storage temperature |
-40° C to +70° C |
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Max altitude |
3000 m |
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|
Weight kg (lbs) |
Pump ISO 100 |
5.5 kg (12.3) |
|
Pump CFF 6’’ |
7.5 kg (16.5) |
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|
Pump ISO 160 |
5.7 kg (12.6) |
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|
Pump CFF 8’’ |
9.7 kg (20.9) |
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