Pumping speed 
ISO 160: 
CFF 10” or ISO 200: 
ISO 250:

N₂: 790 l/s
N₂: 950 l/s 
N₂: 1,050 l/s

He: 820 l/s 
He: 870 l/s 
He: 900 l/s

H₂: 860 l/s 
H₂: 900 l/s 
H₂: 920 l/s

Compression ratio 
ISO 160 
CF 10”/ISO200 - ISO250

N₂: 1 x 10⁹ 
N₂:1 x 10⁹

He: 1 x 10⁷ 
He: 1 x 10⁷

H₂: 1 x 10⁶ 
H₂: 1 x 10⁶

Base pressure*
(with minimum recommended forepump)

<1 x 10^-10 mbar (< 1 x 10^-10 Torr)

Inlet flange

ISO 160 / ISO 200 ISO 200-F bolted / CF 10” / ISO 200 / ISO 200-F bolted

Foreline flange

KF40

Rotational speed

38,000 rpm

Start-up time

< 4 minutes

Recommended forepump

Mechanical: Varian DS 402 
Dry scroll: Varian TS300

Operating position

Any

Cooling requirements

Forced air or water

Bakeout temperature

120 °C at inlet flange max. (CF flange) 
80 °C at inlet flange max. (ISO flange)

Vibration level (displacement)

<0.01 μm at inlet flange

Weight kg (lbs):
ISO 160 flange
ISO 200 flange
CF 10” flange
ISO 250 flange
ISO 200-F and 250-F bolted flange, CF 10” flange

19 (41.8)
19.4 (43.0)
25.5 (54.2)
21.2 (46.6)
25.5 (54.2)