
V1001 Turbo Pump
Technical Specifications
Pumping speed |
N2: 790 l/s |
He: 820 l/s |
H2: 860 l/s |
Compression ratio |
N2: 1 x 109 |
He: 1 x 107 |
H2: 1 x 106 |
Base pressure* |
<1 x 10-10 mbar (< 1 x 10-10 Torr) |
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Inlet flange |
ISO 160 / ISO 200 ISO 200-F bolted / CF 10” / ISO 200 / ISO 200-F bolted |
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Foreline flange |
KF40 |
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Rotational speed |
38,000 rpm |
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Start-up time |
< 4 minutes |
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Recommended forepump |
Mechanical: Varian DS 402 |
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Operating position |
Any |
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Cooling requirements |
Forced air or water |
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Bakeout temperature |
120 °C at inlet flange max. (CF flange) |
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Vibration level (displacement) |
<0.01 μm at inlet flange |
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Weight kg (lbs): |
19 (41.8) |