AX-65 Diffusion Pump
Technical Specifications
| Pumping Speed, Operating Range | 65 l/sec Air, 90 l/s He and H2 |
| Maximum Throughput | 0.19T-l/s (0.25 mbar-l/s) in operating range 0.30T-l/s (0.40 mbar-l/s) @ 0.01 torr |
| Compression Ratio | 4 x 107 (Air), 2 x 106 (helium) |
| Operating Range | 3 x 10-3 to <5 x 10-8 torr (3.9 x 10-3 to 6.5 x 10-8 mbar) |
| Maximum Forepressure | No load: 0.75 torr (1.00 mbar) Full Load: 0.60 torr (0.78 mbar) |
| Backstreaming Rate | With cold cap: <2 x 10-4 mg/cm2/min With baffle: <2 x 10-5 mg/cm2/min |
| Recommended Backing Pump | ≥1.5 cfm (2.5 m3/hr) |
| Warmup Time | 7 minutes |
| Cooldown Time | 10 minutes |
| Fluid Charge | 30 cc |
| Electrical Requirements | 1 ph, 50/60 Hz, 90/115/165/220 VAC |
| Pump Power | 200/250 watts |
| Air Cooling | 30 cfm |