| Pumping Speed |
KF 40 |
CFF 2.75" |
ISO 63 / CFF 4.5” |
| Ar |
44 l/s |
57 l/s |
66 l/s |
| N2 |
49 l/s |
56 l/s |
67 l/s |
| He |
38 l/s |
46 l/s |
63 l/s |
| H2 |
36 l/s |
40 l/s |
53 l/s |
| Gas throughput at full rotational speed (with recommended forepump) |
Air cooling (25°C) |
Water cooling (25°C, 65 l/h) |
| N2 |
100 sccm |
100 sccm |
| Ar |
70 sccm |
70 sccm |
| Compression ratio & Foreline tolerance |
Compression ratio |
Foreline tolerance |
| Ar |
> 1.0 x 1011 |
> 14 mbar |
| N2 |
≥ 1.0 x 1011 |
> 14 mbar |
| He |
2.0 x 106 |
> 12 mbar |
| H2 |
5.0 x 104 |
> 4 mbar |
| Base pressure with recommended forepump (5 m3/h) |
< 8.0 x 10-10 mbar (< 6.0 x 10-10 Torr) |
| Inlet flange |
CFF 4.5”, ISO 63 |
| CFF 2.75”, KF 40 |
| Foreline flange |
KF16 |
| Rotational speed |
81,000 rpm (1350 Hz driving frequency) |
| Start-up time |
< 2 minutes |
| Recommended forepump |
Mechanical: |
Agilent DS-42/102 |
| Dry pump: |
Agilent SH-110/IDP-3 |
| Operating position |
Any |
| Operating ambient temperature |
5 °C to 35 °C |
| Relative humidity of air |
0 - 90 % (not condensing) |
| Bakeout temperature |
80°C at inlet flange max (ISO flange) |
| 120°C at inlet flange max (CFF flange) |
| Lubricant |
Permanent lubrication |
| Cooling requirements |
Air flow temperature: (5 to 35 °C ambient) |
| Water (mandatory if ambient temperature > 35 °C): |
| Water temperature: |
15 °C to 25 °C |
| Minimum flow: |
65 l/h (0.30 GPM) |
| Pressure: |
2 to 4 bar (45 to 75 psi) |
| Noise pressure level |
< 40 dB(A) at 1 meter, full speed |
| Storage temperature |
-40° C to 70° C |
| Max altitude |
3000 m |
| Weight kg (lbs) |
Pump ISO 63 |
2.05 kg |
| |
Pump CFF 4.5” |
3.50kg |
| |
Pump CFF 2.75” |
3.34kg |
| |
Pump KF 40” |
2.37kg |
| Conformity to Norms |
EMC |
61326-1 |
| |
Safety (CE/CSA) Regulatory |
DIR 2006/42/CE |
| |
ROHS |
DIR 2011/65/EU |
