冰研應用股份有限公司Advanced HiVac Application Co., LTD
  

HS-16 Diffusion Pump



HS-16Manual.pdf

Technical Specifications

 

Pumping Speed, Operating Range 6,000 L/S Air, 7,500 L/S He And H2
Pumping speed*, AVS 4.1(1963) 10,000 l/s air
Maximum throughput 8,100 W – 9.5 T-l/s (12.7 mbar l/s) in operating range13.5 T-l/s (18.0 mbar-l/s) @ 0.01 Torr
9,600 W –12.0 T-l/s (16 mbar l/s) in operating range 11.5 T-l/s (15.3 mbar-l/s) @ 0.01 Torr
Operating range 2 x 10-3 to <5 x 10-8 Torr at 9,600 W (1.3 x 10-3 to <6.5 x 10-8 mbar)
Maximum forepressure No load – 0.65 Torr (0.85 mbar), Full Load – 0.55 Torr (0.72 mbar)
Pump power 8100/9600 watts
Recommended backing pump ≥ 80 cfm (136 m3/hr)
Backstreaming rate**, standard cold cap <1.5 x 10-3 mg/cm2/min
Warmup time 30 minutes
Cooldown time 48 minutes (30 minutes with optional quick cool coil)
Fluid charge 3 quarts (2.8 liters)
Electrical requirements 3 ph, 50/60 Hz, 240/415/480 VAC
Cooling water requirements 1.5 gpm (300 l/hr) at 60-80 °F (15-26 °C)
Water connections 1⁄4 in. FPT Tee
Recommended fluid DC-704 (see page 30 of catalog)


 

 

 

 

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