HS-16 Diffusion Pump
Technical Specifications
Pumping Speed, Operating Range | 6,000 L/S Air, 7,500 L/S He And H2 |
Pumping speed*, AVS 4.1(1963) | 10,000 l/s air |
Maximum throughput | 8,100 W – 9.5 T-l/s (12.7 mbar l/s) in operating range13.5 T-l/s (18.0 mbar-l/s) @ 0.01 Torr 9,600 W –12.0 T-l/s (16 mbar l/s) in operating range 11.5 T-l/s (15.3 mbar-l/s) @ 0.01 Torr |
Operating range | 2 x 10-3 to <5 x 10-8 Torr at 9,600 W (1.3 x 10-3 to <6.5 x 10-8 mbar) |
Maximum forepressure | No load – 0.65 Torr (0.85 mbar), Full Load – 0.55 Torr (0.72 mbar) |
Pump power | 8100/9600 watts |
Recommended backing pump | ≥ 80 cfm (136 m3/hr) |
Backstreaming rate**, standard cold cap | <1.5 x 10-3 mg/cm2/min |
Warmup time | 30 minutes |
Cooldown time | 48 minutes (30 minutes with optional quick cool coil) |
Fluid charge | 3 quarts (2.8 liters) |
Electrical requirements | 3 ph, 50/60 Hz, 240/415/480 VAC |
Cooling water requirements | 1.5 gpm (300 l/hr) at 60-80 °F (15-26 °C) |
Water connections | 1⁄4 in. FPT Tee |
Recommended fluid | DC-704 (see page 30 of catalog) |