
V81-T Turbo Pump
Technical Specifications
Pumping speed (l/s) |
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With CF 4 1/2” or ISO 63: |
N2: 77 l/s |
He: 65 l/s |
H2: 50 l/s |
With CF 2 3/4” or KF 40: |
N2: 50 l/s |
He: 56 l/s |
H2: 46 l/s |
Compression ratio |
N2: >7 x 106 |
He: 3 x 103 |
H2: 3 x 102 |
Base pressure* (with recommended forepump) |
5 x 10-9 mbar (3.8 x 10-9 Torr) |
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Inlet flange |
CF 4 1/2” O.D. CF 2 3/4” O.D. |
ISO 63 KF 40 |
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Foreline flange |
KF 16 NW |
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Rotational speed |
1350 Hz (max) |
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Start-up time |
< 60 seconds |
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Recommended forepump |
Mechanical: Agilent DS 42 – DS 102 Dry pump: Agilent IDP-2, IDP-3, SH 110 |
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Operating position |
Any |
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Cooling requirements |
Natural air convection Forced air or water optional |
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Bakeout temperature |
120 °C at inlet flange max. (CF flange) 80 °C at inlet flange max. (ISO flange) |
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Vibration level (displacement) |
<0.01 µm at inlet flange |
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Weight kg (lbs) |
ISO 63: 1.82 (4) CF 4 1/2”: 2,86 (5.90) |