VHS-10 Diffusion Pump
Technical Specifications
| Pumping Speed, Operating Range Pumping Speed, AVS 4.1 (1963) | 3,650 l/s Air, 4,560 l/s He/H2 5,300 l/s Air |
| Maximum Throughput | 6.3 T-l/s (8.4 mbar l/s) in operating range 7.5 T-l/s (10.0 mbar l/s) @ 0.01 torr |
| Operating Range | 1.7 x 10-3 to <5 x 10-9 torr at 4400 W (2.3 x 10-3 to <6.5 x 10-9 mbar) |
| Maximum Forepressure | No Load: 0.65 torr (0.85 mbar) Full Load: 0.55 torr (0.72 mbar) |
| Recommended Backing Pump | ≥ 30 cfm (51 m3/hr) |
| Backstreaming Rate, Standard Cold Cap | <5.0 x 10-4 mg/cm2/min |
| Warmup Time | 15 minutes |
| Cooldown Time | 25 minutes |
| Fluid Charge | 1,000 cc |
| Electrical Requirements | 3 ph, 50/60 Hz, 208/240/380/480 VAC |
| Pump Power | 4400 watts |
| Cooling Water Requirements | 0.40 gpm (80 l/hr) |
| Water Connections | 1⁄8 in. FPT Tee |