冰研應用股份有限公司Advanced HiVac Application Co., LTD
  

V2300 Turbo Pump



 

V2300.pdf

Technical Specifications

 



 

 

 

 

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Advanced HiVac Application Co., LTD
TEL:886-37-620-170 FAX:886-37-620-172
email:tedchen25@yahoo.com.tw ,tiya.ye@hivac.com.tw
No.45-2, Dapuding, Zhunan Township, Miaoli County 350, Taiwan (R.O.C.)
Vacuum Performances
Pumping speed for N2 (*) 2050 l/s
Pumping speed for He (*) 1800 L/s
Pumping speed for H2 (*) 1500 L/s
Compression ratio for N2 >8 x 108
Compression ratio for He 8 x 105
Compression ratio for H2 4 x 104
Base pressure* (with recommended forepump) 10-10 mbar (7.5 x 10-11 Torr) (**)
Inlet Flange ISO 250F, CFF 12” O.D.
Foreline flange KF 40 NW
Other
Nominal rotational speed 33300 rpm
Start-up time without gas load and with the recommended forepump < 6 minutes
Minimum recommended forepump TriScroll 600
Operational position Any
Operating ambient temperature +5 °C to +35 °C
Bakeout temperature 120°C (CFF), 80°C (ISO)
Max rotor temperature 120 °C
Vibration level (displacement) < 0.01 μm at inlet flange
Lubricant