V3-KG Pump
| Pumping speed With ISO 250F: | N2: 2200 l/s Ar: 2050 l/s He: 1900 l/s |
| Compression ratio | N2: >1 x 107 Ar: >1 x 108 He: 6 x 103 |
| Throughput (sccm) | >1400 for Nitrogen |
| Base pressure (mbar) | <10-8 |
| Inlet flange | ISO 250F |
| Foreline flange | KF40 NW |
| Rotational speed | 31800 RPM |
| Start-up time | < 6 minutes |
| Foreline pressure | < 0.5 mbar |
| Recommended forepump | > 60m3/h (depending on gas flow requirements) |
| Operating position | Any |
| Cooling methods | Water |
| Weight | 52Kg |