V701 Turbo Pump
| Pumping speed CF 10” or ISO 200: | N2: 690 l/s | He: 620 l/s | H2: 510 l/s |
| Compression ratio | N2: 1 x 109 | He: 1 x 107 | H2: 1 x 106 |
| Base pressure* (with minimum recommended forepump) |
<1 x 10-10 mbar (< 1 x 10-10 Torr) | ||
| Inlet flange | CF 10” / ISO 200 / ISO 200-F bolted | ||
| Foreline flange | KF25 | ||
| Rotational speed | 42,000 rpm | ||
| Start-up time | < 5 minutes | ||
| Recommended forepump | Mechanical: Varian DS 402 Dry scroll: Varian TS300 |
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| Operating position | Any | ||
| Cooling requirements | Natural air convection Water optional (use water with electrical conductivity ≤ 500 μS/cm) |
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| Bakeout temperature | 120 °C at inlet flange max. (CF flange) 80 °C at inlet flange max. (ISO flange) |
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| Vibration level (displacement) | <0.01 μm at inlet flange | ||
|
<(lbs) kg> |
ISO flange 19.4 (43.0) CF flange 25.5 (54.2) CF and ISO bolted flange 25.5 (54.2)& | ||