冰研應用股份有限公司Advanced HiVac Application Co., LTD
  

VHS-250 Diffusion Pump



VHS-250.pdf

Technical Specifications

Pumping Speed, Operating Range Pumping Speed, AVS 4.1 (1963) 2,125 l/s Air, 2,660 l/s He/H2 3,700 l/s Air
Maximum Throughput 2.6 T-l/s (3.5 mbar-l/s) in operating range, 3.5 T-l/s (4.5 mbar l/s) @ 0.01 torr
Operating Range 1.2 x 10-3 to <5 x 10-9 torr (1.6 x 10-3 to <6.5 x 10-9 mbar)
Maximum Forepressure No Load: 0.65 torr (0.85 mbar) Full Load: 0.55 torr (0.72 mbar)
Recommended Backing Pump ≥17 cfm (29 m3/hr)
Backstreaming Rate, Standard Cold Cap < 5.0 x 10-4 mg/cm2/min
Warmup Time 10 minutes
Cooldown Time 10 minutes (with quick cool coil)
Fluid Charge 500 cc – exact fluid charge available
Electrical Requirements 1 ph, 50/60 Hz, 120/208/240 VAC
Pump Power 2200 watts
Cooling Water Requirements 0.25 gpm (50 l/hr)
Water Connections 1⁄8 in. FPT Tee


 

 

 

 

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