冰研應用股份有限公司Advanced HiVac Application Co., LTD
  

HS-32 Diffusion Pump



HS-32Manual.pdf

Technical Specifications

Pumping Speed, Operating Range 
Pumping Speed, AVS 4.1 (1963)
17,300 l/s Air, 21,625 l/s He and H2
32,000 l/s Air
Maximum Throughput 30 T-l/s (40 mbar l/s) in operating range, 35 T-l/s (45 mbar-l/s) @ 0.01 torr
Operating Range 1.7 x 10-3 to <5 x 10-8 torr (2.3 x 10-3 to <6.5 x 10-8 mbar)
Maximum Forepressure No Load: 0.50 torr (0.65 mbar) 
Full Load: 0.35 torr (0.45 mbar)
Recommended Backing Pump ɛ300 cfm (510 m3/hr)
Backstreaming Rate, Standard Cold Cap <7 x 10-4 mg/cm2/min
Warmup Time 60 minutes
Cooldown Time 180 minutes
Fluid Charge 3 U.S. gallons (11.3 liters)
Electrical Requirements 3 ph, 50/60 Hz, 240/415/480 VAC
Pump Power 24,000 watts
Cooling Water Requirements 4 gpm (800 l/hr) at 60-80°F (15-26°C)
Water Connections 3⁄8 in. FPT Tee
Recommended Fluid DC-704


 

 

 

 

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