Pumping speed (l/s)

With CF 4 1/2” or ISO 63:

N₂: 77 l/s

He: 65 l/s

H₂: 50 l/s

With CF 2 3/4” or KF 40:

N₂: 50 l/s

He: 56 l/s

H₂: 46 l/s

Compression ratio

N₂: >7 x 10⁶

He: 3 x 10³

H₂: 3 x 10²

Base pressure* (with recommended forepump)

5 x 10^-9 mbar (3.8 x 10^-9 Torr)

Inlet flange

CF 4 1/2” O.D.

CF 2 3/4” O.D.

ISO 63

KF 40

Foreline flange

KF 16 NW

Rotational speed

1350 Hz (max)

Start-up time

< 60 seconds

Recommended forepump

Mechanical: Agilent DS 42 – DS 102

Dry pump: Agilent IDP-2, IDP-3, SH 110

Operating position

Any

Cooling requirements

Natural air convection

Forced air or water optional

Bakeout temperature

120 °C at inlet flange max. (CF flange)

80 °C at inlet flange max. (ISO flange)

Vibration level (displacement)

<0.01 µm at inlet flange

Weight kg (lbs)

ISO 63: 1.82 (4)

CF 4 1/2”: 2,86 (5.90)