冰研應用股份有限公司Advanced HiVac Application Co., LTD
  

SH110 Scroll Pump



SH 110.pdf

Technical Specifications

Peak pumping speed (60 Hz)

110 L/m, 6.6 m³/hr, 4.0 cfm

Peak pumping speed (50 Hz)

90 L/m, 5.4 m³/hr, 3.3 cfm

Ultimate pressure

5.0 × 10-2 torr (6.6 × 10-2 mbar)

Maximum inlet pressure

1 atmosphere (0 psig)

Maximum outlet pressure

1.5 atmosphere (7.5 psig)

Inlet connection

NW25 KF flange

Exhaust connection

1⁄4-in. female nat’l pipe thread

Exhaust connection adapter

NW16 KF adapter provided

Gas ballast connection

1⁄8-in. female nat’l pipe thread

Ambient operating temperature

5 to 40 °C (41 to 104 °F)

Storage temperature

–20 to 60 °C (–4 to 140 °F)

Motor rating

0.25 horsepower (0.19 kW)

Supply power

1 phase, 50-60 Hz,
100-115/200-230 VAC

Motor thermal protection

Automatic

Rotation speed

1725 RPM at 60 Hz
1425 RPM at 50 Hz

Cooling

Air-cooled

Weight

19.5 kg (43 lbs)

Restrictions

No corrosive, explosive, or particulate-forming gases

Leak rate (exhaust sealed)

<1 × 10-7 std-cc/sec helium

Compliances

Conforms with CE, CSA, and Semi S2-2000



 

 

 

 

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